基于宽带噪声激励的MEMS模态局域化传感方法
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中央高校基本科研业务费专项资金资助(226-2025-00237),国家自然科学基金资助项目(12202355)


A MEMS Modal Localization Sensing Method Based on Broadband Noise Excitation
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    摘要:

    模态局域化因其对结构微扰高度敏感的特性,在微机电系统(MEMS)传感器领域展现出独特优势.然而,传统模态局域化谐振器多依赖扫频激励,只能激发单一模态,且受限于开环幅值稳定性差与双闭环驱动易失稳的问题,导致传感器难以实现实时测量与快速响应.针对这一瓶颈,本文以双梁耦合谐振器为研究对象,提出了一种基于宽带噪声激励的模态局域化传感方法.该方法利用宽带噪声激发系统多个模态,并通过功率谱密度分析提取模态能量分布变化特征,实现高效、灵敏的扰动检测.本文建立了宽带噪声激励下双梁MEMS谐振器耦合动力学模型,结合数值仿真与实验研究,对比分析了扫频激励与噪声激励下的模态响应特性.结果表明,宽带噪声激励下的模态局域化效应与谐波激励具有高度一致性,验证了该方法的可行性与有效性.

    Abstract:

    Modal localization, owing to its high sensitivity to structural perturbations, has demonstrated unique advantages in the field of microelectromechanical systems (MEMS) sensors. However, traditional modal localization resonators mostly rely on frequency-swept excitation, which can only stimulate a single mode and suffer from poor amplitude stability in open-loop operation as well as instability issues in dual closed-loop driving. These limitations hinder the realization of real-time measurement and fast response. To address this challenge, this paper investigates a coupled double-beam resonator and proposes a modal localization sensing method based on broadband noise excitation. The proposed method drives multiple modes simultaneously using broadband noise and extracts the variation characteristics of the modal energy distribution through power spectral density analysis, enabling efficient and sensitive perturbation detection. A coupled dynamic model of a dual beam MEMS resonator under broadband noise excitation is established, and numerical simulations together with experimental studies are conducted to comparatively analyze the modal responses under frequency-swept and noise-driven excitations. The results show that the modal localization effect under broadband noise driven conditions is highly consistent with that under harmonic driving, thereby verifying the feasibility and effectiveness of the proposed method.

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吕强锋,牛阳,宦荣华,王雪峰.基于宽带噪声激励的MEMS模态局域化传感方法[J].动力学与控制学报,2026,24(2):45~53; Lv Qiangfeng, Niu Yang, Huan Ronghua, Wang Xuefeng. A MEMS Modal Localization Sensing Method Based on Broadband Noise Excitation[J]. Journal of Dynamics and Control,2026,24(2):45-53.

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  • 收稿日期:2025-05-14
  • 最后修改日期:2025-07-25
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  • 在线发布日期: 2026-02-06
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