To address the need for high-precision machining and positioning in the industrial production of integrated circuit equipment, a displacement measurement system using a reflective grating was studied. Based on the principle of high-precision plane grating measurement, a reflective grating ruler displacement measurement system was established. By utilizing the geometric relationship between the reading head beam and the grating plane, the relationship between the displacement of the light spot and the position of the displacement platform was established, thereby converting the reflected optical signal of the grating into positional information of the displacement platform. An experimental platform for displacement measurement of grating reflection signals was designed, and experiments were conducted to verify the principles of the reflective incremental grating ruler measurement system, as well as to assess measurement consistency and stability. Experimental results demonstrate that the principle of the grating ruler displacement measurement system is correct, with a measurement accuracy reaching ± 2 μm/cm, which meets the requirements for high-precision machining and positioning in the industrial production of integrated circuit equipment.