面向二维轨迹跟踪的精密运动台定量反馈交叉耦合控制方法
作者:
基金项目:

国家自然科学基金资助项目(52375530)


A Quantitative Feedback Cross-Coupling Control Method for Precision Motion Stages Oriented to Two-Dimensional Trajectory Tracking
  • 摘要
  • | |
  • 访问统计
  • |
  • 参考文献
  • |
  • 相似文献
  • |
  • 引证文献
  • | |
  • 文章评论
    摘要:

    高端制造业中对零件精度的需求逐级提高,衍生出高精度轮廓控制的需求,双轴精密运动平台由于其结构刚度高,控制频宽等优点,被广泛应用于数控设备中.本文首先基于双轴运动台的动力学模型,为解耦后的单轴系统设计了前馈反馈相结合的复合控制方法.其次基于切线逼近的轮廓误差模型,对交叉耦合控制策略的框图进行求解,获得了有无交叉耦合控制器的轮廓误差传递函数,并建立了等效反馈回路.再次,分别使用PID调试与定量反馈的方法为时变等效受控对象设计了交叉耦合控制器,并验证定量反馈交叉耦合控制器满足了设计条件.最后通过输入不同参考轨迹,仿真验证定量反馈交叉耦合控制相较于PID型交叉耦合控制在轨迹跟踪性能和适应不同轨迹的优越性.

    Abstract:

    The demand for part accuracy in high-end manufacturing is increasing steadily, thereby driving the demand for high-precision contour control. The dual-axis precision motion stage is widely used in CNC equipment due to its advantages of high structural rigidity and wide control frequency. In this paper, we first present a composite control method combining feed-forward and feedback for a decoupled single-axis system based on the dynamics model of the dual-axis motion stage. Secondly, the contour error model of tangent approximation is employed to solve the block diagram of the cross-couped control strategy, thereby obtaining the contour error transfer function with or without cross-coupling controller and establishing the equivalent feedback loop. Once more, cross-coupled controllers are designed for time-varying equivalent controlled objects using PID debugging and quantitative feedback methods, respectively. It is demonstrated that the quantitative feedback cross-coupled controllers satisfy the design conditions. Ultimately, by inputting different reference trajectories, simulation verifies the superiority of quantitative feedback cross-coupled control compared with PID-type cross-coupled control in terms of trajectory tracking performance and adaptation to different trajectories.

    参考文献
    相似文献
    引证文献
引用本文

高殿淳,黄嘉聪,吴锡鹏,宋法质.面向二维轨迹跟踪的精密运动台定量反馈交叉耦合控制方法[J].动力学与控制学报,2024,22(12):37~44; Gao Dianchun, Huang Jiacong, Wu Xipeng, Song Fazhi. A Quantitative Feedback Cross-Coupling Control Method for Precision Motion Stages Oriented to Two-Dimensional Trajectory Tracking[J]. Journal of Dynamics and Control,2024,22(12):37-44.

复制
分享
文章指标
  • 点击次数:
  • 下载次数:
  • HTML阅读次数:
  • 引用次数:
历史
  • 收稿日期:2024-08-29
  • 最后修改日期:2024-10-10
  • 在线发布日期: 2024-12-27
文章二维码

微信公众号二维码

手机版网站二维码