With the rapid development of micro and nano fabrication technology, nanoscale metamaterials have gradually become a hot research field. Nanoscale metamaterials have their unique advantages in the regulation of high frequency elastic wave and the suppression of vibration and noise. Due to the complexity of their service environment, the vibration of nanoscale metamaterials is often coupled with thermal, optical and electrical factors. Its research is developing towards smaller sizes, higher frequencies and multi-field coupling. In this paper, the experimental and theoretical progress of nanoscale metamaterials in vibration suppression is reviewed. Meanwhile, the research achievements of nanoscale metamaterials in thermal management and multi-field coupling are briefly reviewed. The future development prospect and direction of nanoscale metamaterials are prospected.